Old Web
English
Sign In
Acemap
>
Paper
>
Development of silicon optics for an integrated micro-optical system-on-a-chip
Development of silicon optics for an integrated micro-optical system-on-a-chip
2013
David C. Ng
Sasikaran Kandasamy
Efstratios Skafidas
Keywords:
System on a chip
Materials science
Optoelectronics
Deep reactive-ion etching
Silicon
Correction
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]