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Low Temperature Fabrication of SiN x films through Control of Growth of Nanoparticles in Reactive Plasma
Low Temperature Fabrication of SiN x films through Control of Growth of Nanoparticles in Reactive Plasma
2020
Kamataki Kunihiro
Yoshida Tomoaki
Abe Kohei
Sasaki Yusuke
Nagaishi Shota
Iwamoto Ryosuke
Yamashita Daisuke
Itagaki Naho
Koga Kazunori
Shiratani Masaharu
Keywords:
Chemical substance
Magazine
reactive plasma
Fabrication
Nanotechnology
Imagination
Nanoparticle
Materials science
Science, technology and society
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