Innovative MEMS-MMIC components for agile antenna frontends

This article describes the MEMS-MMIC building blocks, developed during the FP7 EU-project MEMS-4-MMIC, and their possible implementation in agile RF-frontend technology such as phased arrays. MEMS-4-MMIC focuses on the combination of innovative RF-MEMS switch designs with established MMIC-technology. The ultimate goal is to include RF-MEMS switches into a standard commercial MMIC foundry process; hence, such switches will become standard building blocks for MMIC circuits similar to transistors, resistors and capacitors. Within the project, not only the development and qualification of the MEMS-MMIC designs and processes are considered but also MEMS-MMIC circuits are designed for agile systems like phased arrays or cognitive radio, for example, which will benefit from this type of building blocks. A whole range of different MEMS-MMIC circuits has been realized, and measured. The impact of such building block on phased array topologies has also been evaluated.