Backstepping Control Approach forClosedLoop Feedback Control ofAtomic Force Microscope

Inthispapera modelanda nonlinear control schemeforanatomic force microscope aredeveloped. Forthis reason abackstepping control algorithm isdeveloped toachieve asymptotic cantilever tiptracking forboundedtiptrajectories. Inaddition, themicrocantilever ismodeled bytheinteraction betweensampleand cantilever withtheVan derwaals attraction/repulsion force(i.e., the interaction forces). Simulation results obtained confirm theeffectiveness and validity oftheproposed controller. I. INTRODUCTION