Influence of oxygen concentration on optical properties of semi-insulating polycrystalline silicon films

Optical properties of semi-insulating polycrystalline silicon (SIPOS) films were investigated over the wide region of wavelengths. The vibrational modes of Si-O-Si and Si-Si bonds were studied by IR and Raman spectroscopy. A pronounced effect of oxygen content on the measured spectra was observed. Optical constants of SIPOS films have been compared with those of amorphous silicon and glassy silicon dioxide and their values have been successfully interpreted in terms of the theory of effective medium. The results have shown that the amorphous character prevails in the as-deposited SIPOS films.