Generation of VUV radiation in the kilowatt power arange down to 130 nm by stimulated Raman scattering in hydrogen

Two schemes of VUV‐generation by stimulated Raman scattering in H2 are discussed in the following. In the first case, tuned, narrow‐bandwidth dye laser radiation in the green yields 13 AS components down to 138 nm. In this application, continuous tunability is the main feature. In the second version, radiation in the spectral interval around 193 nm is amplified in ArF* and is used for Raman excitation. Tuning is possible over approximately 2 nm. VUV power is especially remarkable in this case.