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Effects of nitrogen doping on the oxygen precipitation in the ultra-high temperature RTP wafers
Effects of nitrogen doping on the oxygen precipitation in the ultra-high temperature RTP wafers
2017
Hideyuki Okamura
Haruo Sudo
Kozo Nakamura
Susumu Maeda
Koji Sueoka
Keywords:
Oxygen
Nitrogen
Doping
Precipitation
Wafer
Inorganic chemistry
Materials science
oxygen precipitation
nitrogen doping
Correction
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