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Development of Low Energy Focused Ion Beam System for Direct Deposition
Development of Low Energy Focused Ion Beam System for Direct Deposition
1993
Shinji Nagamachi
Yasuhiro Yamakage
Hiromasa Maruno
Masahiro Ueda
Seiji Sugimoto
Masatoshi Asari
Junzo Ishikawa
Keywords:
Ion beam
Atomic physics
Focused ion beam
Analytical chemistry
Ion beam deposition
Chemistry
low energy
Deposition (law)
Correction
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