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The structures and properties of oxide thin films prepared by MBE method using an oxygen radical source.
The structures and properties of oxide thin films prepared by MBE method using an oxygen radical source.
1995
Shigetani Hisashi
Kobayashi Kazuyoshi
Kawada Yukihiro
Fujimoto Masayuki
Sugimura Wataru
Tanaka Junzo
Keywords:
Oxide
Nanotechnology
Radical
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Materials science
Thin film
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