The mathematical model of the kinetics of the process of obtaining the metal arsen for the manufacture of semiconductor materials

The mathematical model of the kinetics of the reaction of arsenic chloride reduction by hydrogen is worked out in the paper. The equation of the kinetics of the gas reaction in the flow, occurring with the volume variation, is obtained. The kinetics equation can be used for processing the experimental data of the research of the process of the arsenic chloride reduction to the metal arsen in the technology of semiconductor materials manufacture. The use of the mathematical model of the gas reaction kinetics made it possible to improve the installation for carrying out the process of AsCl3 reduction to metal As by hydrogen.