Micromechanical sensor and a processing method with a conductive component

2015 
The present invention discloses a micromechanical sensor and a method for processing with a conductive component. The micromechanical sensor comprising an upper cover, lower cover and sensitive silicon structure, the cover is provided with a fixed capacitor plate of the upper, the lower and the upper cover is provided under the fixed capacitor plate opposite the fixed capacitor plate, said sensitive silicon structure is provided between the upper and lower fixing plate fixed capacitance capacitor plate, also provided with conductive metallic electrode assembly for fixing the lead plate to the lower capacitance between the cover upper and lower covers, effective solve the problem on the extraction electrode plate, the structure is simple, low cost; the process of this invention, comprising the steps of: S1: processing under cover, the upper cover, and the silicon structure sensitive conductive silicon bridge; S2: secured; S3: laser scribing process, the method is simple, greatly reducing the processing cost and processing difficulty.
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