PTFE and C 3 F 6 deposition on the AISI 1050 stainless steel for lubrication by RF plasma

Summary form only given. In this study, on surface of heat treated AISI 1050 stainless steel was coated in RF vacuum plasma system with different plasma parameters (treatment time, type of gas, power, pressure, electrode distance). First stainless steel surfaces were coated by plasma grafting of sprayed polytetrafluoroethylene (PTFE) using by Argon and Helyum plasma. In the other process, thin layer was deposited by hexafluoropropene (C 3 F 6 ) plasma on the stainless steel surface. After the deposition, surface morphology was analysed by Scaning electron microscope (SEM), Energy-dispersive X-ray spectroscopy (EDS), Atomic force microscope (AFM). Abrasion of samples was tested. As a result of abrasion test the C 3 F 6 plasma processes more effective than PTFE coating. Optical emission spectrum (OES) and current-voltage measurements were used for plasma characterization.