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C-3-123 MEMS 光スイッチ (MEMCROS^ ) の信頼性
C-3-123 MEMS 光スイッチ (MEMCROS^ ) の信頼性
2002
tomohiko kanie
makoto katayama
takahiro sunaga
tomohiro hasimoto
hirosi sugenuma
masayuki nisimura
gaku siozaki
masato furukawa
hirosi kou ta
kazuhito saitou
Keywords:
Electronic engineering
Microelectromechanical systems
Materials science
Nanotechnology
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