High-Q 3D RF solenoid inductors in glass

In this paper, we demonstrate the fabrication and characterization of various 3D solenoid inductors using a glass core substrate. Solenoid inductors were fabricated in glass by drilling through holes in glass and semi-additive copper plating for metallization. This topology is compared to similar solenoid structures in terms of Q-factor performance and inductance density. Inductances of 1.8-4.5nH with Q ~ 60 at 1GHz were demonstrated.