Chemical Reactions Impede Thermal Transport Across Metal/β-Ga2O3 Interfaces

The impact of chemical reactions on the thermal boundary conductance (TBC) of Au/metal contact/β-Ga2O3 layered samples as a function of contact thickness is investigated using high-throughput thermoreflectance measurements. A maximum in TBC of 530±40 (260±25) MW/m2-K is discovered for a Cr (Ti) contact at a thickness of 2.5 (5) nm. There is no local maximum for a Ni contact, for which the TBC saturates at 410±35 MW/m2-K for thicknesses greater than 3 nm. Relative to the Au/β-Ga2O3 interface, which has a TBC of 45±7 MW/m2-K, these nanoscale contacts enhance TBC by factors of six to twelve. The TBC maximum only exists for metals capable of forming oxides that are enthalpically favorable compared to β-Ga2O3. The formation of α-Cr2O3, via oxygen removal from the β-Ga2O3 substrate, is confirmed by TEM analysis. The reaction-formed oxide layer reduces the potential TBC and leads to the maximum, which is followed by a plateau at a lower value, as its thickness saturates due to passivation. Many advanced material...