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Mechanical scanning probe lithography of nanophotonic devices based on multilayer TMDCs
Mechanical scanning probe lithography of nanophotonic devices based on multilayer TMDCs
2021
B. R. Borodin
F A Benimetskiy
V. Yu. Davydov
I. A. Eliseyev
S I Lepeshov
Andrey Bogdanov
Prokhor A. Alekseev
Keywords:
Optoelectronics
Scanning probe lithography
Nanophotonics
Materials science
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