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Silicon Nanowire Arrays Using Colloidal Crystal Lithography and Metal-Assisted Etching
Silicon Nanowire Arrays Using Colloidal Crystal Lithography and Metal-Assisted Etching
2010
Claude Lévy-Clément
P. Noe
P. Gentile
Patrick Pittet
X. Wang
Keywords:
Nanotechnology
Lithography
Reactive-ion etching
Etching
Etching (microfabrication)
Analytical chemistry
Colloidal crystal
Nanowire
Metal
Silicon
Materials science
silicon nanowires
polystyrene spheres
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