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MEIS Study of Sb Implantation in O or N pre-implanted Si(001) and SIMOX
MEIS Study of Sb Implantation in O or N pre-implanted Si(001) and SIMOX
2007
Mateus Dalponte
H. Boudinov
Lyudmila V. Goncharova
Eric Garfunkel
T. Gustafsson
Keywords:
Nuclear chemistry
Materials science
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