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Investigation of various surface passivation layers using oxide/nitride stacks of silicon solar cells
Investigation of various surface passivation layers using oxide/nitride stacks of silicon solar cells
2003
Lee
Dicker
Rein
Glunz
Keywords:
Oxide
Materials science
Silicon
Nitride
Solar energy
Silicon nitride
Plasma-enhanced chemical vapor deposition
Passivation
Rapid thermal processing
Optoelectronics
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