High-Impedance, Broadband and Compact RMS Detectors for On-Chip Measurements of Millimeter Wave Voltages for Built-In Self-Testing and Debugging

The high testing cost and challenges of debugging millimeter-wave (mm-wave) CMOS integrated circuits are ameliorated by integrating high-impedance broadband and compact root mean square (RMS) detectors as part of circuits to enable on-chip measurements. The detectors have negligible impact to circuit operation and area, and enable sensing of mm-wave (30 GHz to 300 GHz) voltages using dc/low frequency measurements. The detectors in conjunction with tuning elements can be used to improve circuit performance and yield.