Method for obtaining a soft magnetic thin film, a high magnetization and insulating film and corresponding integrated circuitry
2004
The invention relates to a method for obtaining a soft magnetic thin film, high magnetization and insulator, comprising a nitriding rich ferromagnetic nanograins Fe immersed in an amorphous substrate and a selective oxidation of the substrate amorphe.L ' invention also relates to soft magnetic thin films and insulating high magnetization obtained by the present procede.L'invention also provides an integrated circuit comprising a component using a membrane incorporating a thin film obtained by the same method.
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