Old Web
English
Sign In
Acemap
>
Paper
>
High Temperature 10 Bar Pressure Sensor Based on 3C-SiC/SOI for Turbine Control Applications
High Temperature 10 Bar Pressure Sensor Based on 3C-SiC/SOI for Turbine Control Applications
2001
S. Zappe
J. Franklin
E. Obermeier
M. Eickhoff
H. Möller
G. Krötz
C. Rougeot
O. Lefort
J. Stoemenos
Keywords:
Silicon on insulator
Composite material
Pressure sensor
Turbine
Electronic engineering
Materials science
Mechanical engineering
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
12
Citations
NaN
KQI
[]