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Surface Smoothing Effect in Patterned SO1 Fabrication with SIMOX Technology
Surface Smoothing Effect in Patterned SO1 Fabrication with SIMOX Technology
2003
T Sasaki
S Takayama
K Kawamura
T. Maeda
Y. Nagatake
Atsuki Matsumura
Keywords:
Fabrication
surface
Materials science
Smoothing
Optoelectronics
Correction
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