Ultra sensitive optomechanical microdisk resonators with very large scale integration process

Nano-optomechanical resonators have demonstrated in the last few years their enormous potential for applications such as mass and chemical sensing. Operation in liquid of such resonators has been demonstrated very recently by two groups, showing that biosensing could potentially be performed. Nonetheless, going a step further towards the next generation of high-end biosensors requires scaling up the fabrication process and being able to perform this type of measurement routinely. This paper reports the first Very Large Scale Integration silicon optomechanical microdisk resonators with state-of-the-art performance: high optical-Q and optomechanical coupling allow the Brownian noise of these resonators to be easily resolved at few 100 MHz in ambient air with many different devices and we show how optical performance is maintained in liquid.