Characterization of the magnetic properties of NdFeB thick films exposed to elevated temperatures

Hard magnetic films used in magnetic micro-systems may be exposed to elevated temperatures during film and system fabrication and also during use of the micro-system. In this work, we studied the influence of temperature on the magnetic properties of 10 μm thick out-of-plane textured NdFeB films fabricated by high rate triode sputtering. Out-of-plane hysteresis loops were measured in the range 300K – 650K to establish the temperature dependence of coercivity, magnetization at 7 T and remanent magnetization. Thermal demagnetization was measured and magnetization losses were recorded from 350K in films heated under zero or low (-0.1 T) external field and from 325 K for films heated under an external field of -0.5 T. The effect of thermal cycling under zero field on the remanent magnetization was also studied and it was found that cycling between room temperature and 323 K did not lead to any significant loss in remanence at room temperature, while a 4% drop is recorded when the sample is cycled between RT a...