Energy-sensitive material and its use method
1995
PURPOSE: To provide an energy-sensitive material and its use method. CONSTITUTION: A group of silicon-contg. materials show excellent sensitivity for UV rays and far UV rays for formation of a pattern by conversion of the material into a glass compd. induced by radiation. The material is deposited from a vapor phase and the obtd. material shows excellent characteristics for such use as a resist for the production of electronic and optical devices.
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