Optical Performance Evaluation of Infrared Microlens by Direct Wavefront Sensing at LWIR Wavelength

Present work demonstrates an experimental approach to evaluate the optical performance of the Infrared (IR) microlens based on the Shack-Hartmann wavefront sensing at 10.6 µm wavelength. A Germanium microlens has been evaluated to validate the consistency and accuracy of the developed experimental methodology. The proposed IR optical setup has the capability to measure optical parameters like focal length, transmitted wavefront errors, Zernike coefficients, and PSF of a microlens with the diameter ranging from 500 to 2500 µm and the focal length ≥1 mm.