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SMOOTHING THE SURFACE ROUGHNESS OF ALUMINUM NITRIDE FILMS OBTAINED BY MAGNETRON SPUTTERING
SMOOTHING THE SURFACE ROUGHNESS OF ALUMINUM NITRIDE FILMS OBTAINED BY MAGNETRON SPUTTERING
2020
L. V. Baranova
V. I. Strunin
Keywords:
Aluminium
Surface roughness
Nitride
Smoothing
Sputter deposition
Materials science
Composite material
Correction
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