Optical properties of bismuth niobate thin films studied by spectroscopic ellipsometry

Abstract We performed optical analysis of bismuth niobate thin films using spectroscopic ellipsometry (SE). The films were grown on Pt/Ti/SiO 2 /Si substrates with pulsed laser deposition. Six films were prepared using various deposition temperatures and thermal-annealing times. The room-temperature SE spectra of these films were measured by a rotating-analyzer ellipsometer from 1.12 to 6.52 eV at incidence angles of 50, 55, 60, 65, and 70°. The resulting refractive indices and extinction coefficients show significant changes with deposition temperature and thermal annealing.