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Improving the Silicon Surface Passivation by Aluminum Oxide Grown Using a Non-Pyrophoric Aluminum Precursor
Improving the Silicon Surface Passivation by Aluminum Oxide Grown Using a Non-Pyrophoric Aluminum Precursor
2018
Chang-Yeh Lee
Shaozhou Wang
Xin Cui
Tian Zhang
Rong Deng
Kean T. Khoo
Bram Hoex
Keywords:
Condensed matter physics
Aluminum oxide
Chemical engineering
Passivation
Pyrophoricity
Chemistry
Aluminium
Silicon
Atomic layer deposition
Correction
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