Effects of dielectric film surface on oxygen diffusion
2014
Simultaneoushighcapacitanceandlow dielectric loss are absolutely necessary for thin-film capaci-tors (TFCs). In addition, the fatigue behavior, which currentlylimits both the device reliability and lifetime, also has to beimproved for the utilization of perovskite-type titanate in TFCs.As suggested by earlier studies,
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