High-speed 3D direct laser writing of micro-optical elements
2013
We demonstrate high-speed diffraction-limited 3D direct laser writing using pivoted galvo mirrors. High photoresist curing speeds and stitching of individual scan fields allow for the fabrication of diffractive and refractive micro-optical elements on large areas.
Keywords:
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
5
References
2
Citations
NaN
KQI