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Design of a 1D phase-mask translational scanner for large-size spatially coherent grating printing
Design of a 1D phase-mask translational scanner for large-size spatially coherent grating printing
2018
Olivier Parriaux
Yves Jourlin
Keywords:
Scanner
Optics
Materials science
Grating
Photolithography
Optical engineering
large size
phase mask
Correction
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