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Pressure Dependence of MEMS Oscillator Quality Factor
Pressure Dependence of MEMS Oscillator Quality Factor
2013
Joshua Bauer
Sarah Geiger
Miguel Gonzalez
Pan Zheng
Yoonseok Lee
Keywords:
Oscillation
Electronic engineering
Microelectromechanical systems
Materials science
pressure dependence
Optoelectronics
Correction
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