Fabrication of embedded microfluidic channels in low temperature co-fired ceramic technology using laser machining and progressive lamination

Abstract This paper describes the application of laser micromachining techniques for the fabrication of microfluidic channels in low temperature co-fired ceramic, LTCC, technology. It is shown that embedded cavities can be successfully realised by employing a recently proposed progressive lamination process with no additional fugitive material. Various microfluidic structures have been fabricated and X-ray imaging has been used to assess the quality of the embedded channels after firing. The problem of achieving accurate alignment between LTCC layers is addressed such that deeper channels, spanning more than one layer, can be fabricated using a pre-lamination technique. A number of possible applications for the presented microfluidic structures are discussed and an H-filter particle separator in LTCC is demonstrated.