Chemical Mechanical Planarization (CMP) Wastewater Treatment using Membrane Distillation

Imtisal e. Noor,Andrew Martin,Olli Dahl,Jan Coenen,Miriam Åslin

Chemical Mechanical Planarization (CMP) Wastewater Treatment using Membrane Distillation

2019

Imtisal e. Noor
Andrew Martin
Olli Dahl
Jan Coenen
Miriam Åslin

In nano-electronics industries, the wastewater from Chemical Mechanical Planarization (CMP) process is subjected to a special treatment due to the presence of abrasive chemicals (silica and alumina ...

Keywords:

Abrasive
Pulp and paper industry
process
Sewage treatment
Chemical-mechanical planarization
Wastewater
Membrane distillation
Materials science

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