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Organic-inorganic Hybrid Dielectric with UV Patterning and UV Curing for Global Interconnect Applications
Organic-inorganic Hybrid Dielectric with UV Patterning and UV Curing for Global Interconnect Applications
2018
Changmin Song
Hae-Sung Park
Hankyeol Seo
Sarah Eunkyung Kim
Keywords:
Optoelectronics
UV curing
Interconnection
Dielectric
Materials science
Chemical engineering
organic inorganic
Correction
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