10-Gb/s Direct Modulation of Widely Tunable 1550-nm MEMS VCSEL

We demonstrate direct modulation of a widely tunable microelectromechanical system (MEMS) vertical-cavity surface-emitting laser (VCSEL). The wavelength tuning is realized with electrothermal actuation of a SiO $_x$ /SiN $_y$ -based MEMS distributed Bragg reflector (DBR). The DBR is deposited in a low-temperature plasma-enhanced chemical vapor deposition chamber on a InP-based half-VCSEL by means of surface micromachining. More than 60 nm of mode-hop free continuous tuning with a center wavelength of 1554 nm is achieved. A maximum 3-dB small-signal modulation response ( $S_{21}$ ) bandwidth of 7.05 GHz is reported. Quasi-error-free operation of a back-to-back link is demonstrated at 10 Gb/s for a record 47-nm tuning range, showing the compatibility of the MEMS tunable VCSEL as a cost-effective optical source in access networks and interconnects.