Design and analysis of perforated MEMS resonator

In this paper, we have designed an optimal design of microelectromechanical (MEMS) resonator. The paper explains the idea of suitable design, modeling and optimization of the MEMS RF resonator. The resonator has been designed to achieve a high quality factor and optimum pull in voltage and keeping the dimension as small as possible. The design approach uses the Dragonfly algorithm for minimizing the pull in voltage. The resonator is basically a perforated structure incorporating circular holes.