Gas analyzer and the gas processing devices
2015
According to an embodiment, the gas analyzer includes a cell portion, a light source unit, a detection unit, and a control unit. The cell unit comprises a cell. The cell includes a space that sample gas containing the target material containing fluoride is introduced. The light source unit has a wavelength is incident to the variable of the measurement light to the sample gas introduced into the space. The detector detects the measurement light emitted from the cell unit. The control unit measures the concentration of the target substance contained in the sample gas based on the detected portion detected the measurement light detection result. The light source unit includes a laser portion for emitting the measuring light, and a first adjusting portion for coarsely adjusting said wavelength, and a second adjusting unit for finely adjusting the wavelength, the.
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