Phase Composition, Thermal Stability, Physical and Mechanical Properties of Superhard on Base Zr‐Ti‐Si‐N Nanocomposite Coatings

Sumy Institute for Surface Modification, P.O.Box 163, 40030 Sumy, Ukraine, E-mail: apogrebnjak@simp.sumy.ua Sumy State University, 40021 Sumy, Ukraine, E-mail: alexp@i.ua National Technical University, Kharkov, Ukraine Science Center for Physics and Technology, Kharkov, Ukraine Concern “UKRROSMETAL”, Sumy, Ukraine Samarkand Branch of Tashkent Information Technology University, Samarkand, Uzbekistan Institute of Nuclear Physics, UAS, Tashkent, Uzbekistan