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Helium ion beam lithography and liftoff
Helium ion beam lithography and liftoff
2021
Sabaa Rashid
Jaspreet Walia
Howard Northfield
Choloong Hahn
Anthony Olivieri
Antonio Cala Lesina
Fabio Variola
Arnaud Weck
Lora Ramunno
Pierre Berini
Keywords:
Ion beam lithography
Helium
Optoelectronics
Materials science
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