Novel 2D and 3D M/NEMS devices for accurate electromagnetic measurements.

A study of possible applications of 2D and 3D micro- and nano-electro-mechanical systems (M/NEMS) devices for accurate electromagnetic measurements, in particular RF and microwave (RFMW) power measurements, has recently begun at NPL. A number of novel devices have been designed and fabricated (using commercial foundries) such as 2D coplanar waveguides and RFMW power sensors, and 3D coaxial transmission lines, four terminal-pair capacitors and calculable capacitors. An outline of the devices’ design, simulation, their fabrication process and preliminary results will be presented at the conference.