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Defect characterisation of PECVD-grown diamond
Defect characterisation of PECVD-grown diamond
2001
D.T. Britton
A. Hempel
M. Hempel
M. Härting
W. Bauer-Kugelmann
W. Triftshäuser
Keywords:
Chemical vapor deposition
Diamond
Composite material
Metallurgy
Plasma-enhanced chemical vapor deposition
Materials science
X-ray crystallography
Residual stress
Correction
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