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Deposition and characterization of SiOx-like thin films from HMDSO mixtures plasmas
Deposition and characterization of SiOx-like thin films from HMDSO mixtures plasmas
2019
C. Carra
R. Barni
D. Di Martino
A Natalello
C. Riccardi
Keywords:
Deposition (chemistry)
characterization
Materials science
Chemical engineering
Plasma
Thin film
Correction
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