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Tin oxide thin films deposited with a non-equilibrium 2-dimentional plasma under N 2 /O 2 gas flowing
Tin oxide thin films deposited with a non-equilibrium 2-dimentional plasma under N 2 /O 2 gas flowing
2016
Kento Horimizu
Syota Kanezashi
Yuki Masuda
Masayuki Okuya
Keywords:
Thin film
Plasma
Inorganic chemistry
Materials science
Tin oxide
tin oxide thin films
surface discharge
Analytical chemistry
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