Harmonic and intermodulation performance of a radio-frequency plasma capacitor

In this paper closed-form approximate expressions for the harmonic and intermodulation performance of a radio-frequency plasma capacitor are presented. These expressions are obtained by approximating the nonlinear capacitor-voltage characteristic using a Fourier-series. These expressions are valid over a wide range of the voltage applied across the capacitor and can be used for investigating the large signal performance of the capacitor.