Towards understanding tool influence function (TIF) spots during hemispherical sub-aperture tool polishing

Tayyab I. Suratwala,Joseph A. Menapace,R. Steele,Gary Tham,Lana Wong,Nathan J. Ray,Brian J. Bauman,Michael Gregory,Tom Hordin

Towards understanding tool influence function (TIF) spots during hemispherical sub-aperture tool polishing

2021

Tayyab I. Suratwala
Joseph A. Menapace
R. Steele
Gary Tham
Lana Wong
Nathan J. Ray
Brian J. Bauman
Michael Gregory
Tom Hordin

The key mechanisms & predictive models that determine the spatially dependent material removal rate (called the tool influence function (TIF) spots) during hemispherical sub-aperture tool polishing on flat & curved fused silica glass are presented.

Keywords:

silica glass
Polishing
Aperture
range finding
material removal
Spots
Optics
influence function
Materials science

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