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Photo-assisted etching of silicon in halogen-containing plasmas
Photo-assisted etching of silicon in halogen-containing plasmas
2013
Shyam Sridhar
Weiye Zhu
Lei Liu
Demetre J. Economou
Vincent M. Donnelly
Keywords:
Dry etching
Plasma
Etching
Etching (microfabrication)
Reactive-ion etching
Halogen
Materials science
Silicon
Inorganic chemistry
photo assisted
Optoelectronics
Correction
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