Beam homogenizing device, laser radiating device and method for making semiconductor device

Cylindrical lens array can not be manufactured in the respective cylindrical lenses have the same radius of curvature and the same surface finish. Thus, when the cylindrical lens array is performed by laser annealing, the cylindrical lens array are each split beam spot can not be completely superimposed in the same surface. As a result, a rectangular beam is formed an edge portion of the energy is attenuated region, whereby the intensity distribution of the laser beam becomes uneven. In the present invention, the cylindrical lens array is used in conjunction with optical waveguides. After the laser beam is split cylindrical lens array in a predetermined direction, each of the split beams are combined, then the laser beam is incident on to the same along a predetermined direction acting optical waveguide. This change can be corrected intensity of the laser beam by a cylindrical lens array process caused by imprecise.